SPUTTERED AL-TI ELECTRODES FOR HIGH-FREQUENCY AND HIGH-POWER SAW DEVICES

被引：12
|
作者：
YUHARA, A [1 ]
WATANABE, H [1 ]
YAMADA, J [1 ]
机构：
[1] HITACHI LTD,CONSUMER PROD RES CTR,TOTSUKA KU,YOKOHAMA 244,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷
关键词：
D O I：
10.7567/JJAPS.26S1.135
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：135 / 137
页数：3
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