FURTHER IMPROVEMENTS IN CALIBRATION TECHNIQUES FOR DEPTH PROFILING WITH GLOW-DISCHARGE OPTICAL-EMISSION SPECTROMETRY

被引：67
|
作者：
BENGTSON, A
EKLUND, A
LUNDHOLM, M
SARIC, A
机构：
[1] Swedish Institute for Metals Research, S-114 28 Stockholm
来源：
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY | 1990年 / 5卷 / 06期
关键词：
Calibration technique; Depth profiling; Glow discharge; Optical emission spectrometry;
D O I：
10.1039/ja9900500563
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Quantitative in-depth profiling with glow discharge optical emission spectrometry is discussed. Recent experimental work on the variations in emission intensity with the discharge parameters is presented. An improved empirical intensity expression, which has been incorporated in a quantification model, is proposed. In particular, the proposed model compensates for variations in the emission yield (emission intensity per sputtered atom). Some examples of quantitative in-depth profiles, obtained with the proposed calculation model, are presented.
引用
收藏
页码：563 / 567
页数：5
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