EVIDENCE FOR MOLECULAR-HYDROGEN IN SINGLE-CRYSTAL SILICON

被引：11
|
作者：
MEDA, L
CEROFOLINI, GF
OTTAVIANI, G
TONINI, R
CORNI, F
BALBONI, R
ANDERLE, M
CANTERI, R
DIERCKX, R
机构：
[1] UNIV MODENA,DIPARTMENTO FIS,I-41100 MODENA,ITALY
[2] IRST,DIV SCI MAT,I-38050 TRENT,ITALY
[3] EEC,JRC,I-21020 ISPRA,ITALY
来源：
PHYSICA B | 1991年 / 170卷 / 1-4期
关键词：
D O I：
10.1016/0921-4526(91)90134-Z
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Rutherford backscattering in channeling in combination with elastic recoil detection analysis has been used to study the formation and destruction of hydrogen "supermolecular" complexes (H2)n formed in single crystal silicon after hydrogen implantation and annealing in the range 150-800-degrees-C. Secondary ion mass spectroscopy has been used to confirm this interpretation by giving direct evidence for H-2. The supermolecular configuration can be interpreted as the nucleus for the formation of bubbles.
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页码：259 / 264
页数：6
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