PROPERTIES OF AMORPHOUS SILICON FILMS SPUTTERED IN ARGON-SILANE MIXTURES

被引：0
|
作者：
ANDERSON, JC
机构：
来源：
THIN SOLID FILMS | 1979年 / 58卷 / 02期
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D O I：
10.1016/0040-6090(79)90282-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：412 / 412
页数：1
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