COPPER PASSIVATION OF DISLOCATIONS IN SILICON

被引：13
|
作者：
LEE, JG
MORRISON, SR
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 12期
关键词：
D O I：
10.1063/1.342023
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：6679 / 6683
页数：5
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