METAL-FILMS FOR SEMICONDUCTOR APPLICATIONS

被引：2

|

作者：

CARBAJAL, BG ^{[1
]}

机构：

[1] TEXAS INSTR INC,DALLAS,TX 75222

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 01期

关键词：

D O I：

10.1116/1.1318000

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：284 / &

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