DENSITIES OF AMORPHOUS SI FILMS BY NUCLEAR BACKSCATTERING

被引：73
作者：
BRODSKY, MH
KAPLAN, D
ZIEGLER, JF
机构：
来源：
APPLIED PHYSICS LETTERS | 1972年 / 21卷 / 07期
关键词：
D O I：
10.1063/1.1654388
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：305 / &
相关论文
共 28 条
[1]   RELATIONS BETWEEN STRUCTURE AND OPTICAL AND ELECTRICAL PROPERTIES OF AMORPHOUS SI AND GE FILMS [J].
BRODSKY, MH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01) :125-&
[2]   ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE [J].
BRODSKY, MH ;
TITLE, RS .
PHYSICAL REVIEW LETTERS, 1969, 23 (11) :581-&
[3]   STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J].
BRODSKY, MH ;
TITLE, RS ;
WEISER, K ;
PETTIT, GD .
PHYSICAL REVIEW B, 1970, 1 (06) :2632-&
[4]   ANISOTROPIC MICROSTRUCTURE IN EVAPORATED AMORPHOUS GERMANIUM FILMS [J].
CARGILL, GS .
PHYSICAL REVIEW LETTERS, 1972, 28 (21) :1372-&
[5]   SPECIFIC HEAT AND HEAT OF CRYSTALLIZATION OF AMORPHOUS GERMANIUM [J].
CHEN, HS ;
TURNBULL, D .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (10) :4214-&
[6]  
Chittick R. C., 1970, J NON-CRYST SOLIDS, V3, P255
[7]   STRUCTURAL, ELECTRICAL, AND OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM FILMS [J].
CHOPRA, KL ;
BAHL, SK .
PHYSICAL REVIEW B, 1970, 1 (06) :2545-&
[8]   ELECTRICAL AND OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM [J].
CLARK, AH .
PHYSICAL REVIEW, 1967, 154 (03) :750-&
[9]   A HIGH DENSITY FORM OF AMORPHOUS GE [J].
DONOVAN, TM ;
ASHLEY, EJ ;
SPICER, WE .
PHYSICS LETTERS A, 1970, A 32 (02) :85-&
[10]   EVIDENCE FOR A SHARP ABSORPTION EDGE IN AMORPHOUS GE [J].
DONOVAN, TM ;
SPICER, WE ;
BENNETT, JM .
PHYSICAL REVIEW LETTERS, 1969, 22 (20) :1058-&
123