Elastic Imaging of Material Surface by Ultrasonic Atomic Force Microscopy

The ultrasonic atomic force microscope(UAFM) has been developed in order to enhance the characterization technology for nano-scale surface combining ultrasonic property to atomic force microscope. This UAFM technique enables elasticity imaging due to the physical properties on the heterogeneous surface in addition to the novel topography of surface height in the nano-surface layer. In this study, the prototype UAFM system was constructed and applied to several materials, silicon deposited wafer, spherodized cold heading steel, and carbon fiber reinforced plastic specimen. Clear elastic contrast was successfully obtained using this developed prototype UAFM.