SUBSTRATE EFFECT ON THE LATTICE-CONSTANTS OF THE MBE-GROWN IN1-XGAXAS AND GASB1-YASY

被引:17
作者
CHANG, CA
SEGMULLER, A
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
MOLECULAR BEAMS - Applications - SEMICONDUCTING GALLIUM COMPOUNDS - Growth;
D O I
10.1116/1.569927
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have analyzed the lattice constants of InAs and GaSb grown on GaAs using molecular beam expitaxy (MBE). The observed deviations between the MBE and bulk samples, especially for GaSb, can be largely accounted for by the thermal stress induced in the films. Our analysis indicates that a similar thermal stress could cause APP 1STH 20% variation in alloy compositions of In//1// minus //xGa//xAs required to match the lattices of two GaSb//1// minus //yAs//y films which have the same y but are separately grown on GaAs and GaSb substrates.
引用
收藏
页码:285 / 287
页数:3
相关论文
共 6 条
[1]   THERMAL EXPANSION AND RELATED BONDING PROBLEMS OF SOME III-V COMPOUND SEMICONDUCTORS [J].
BERNSTEIN, L ;
BEALS, RJ .
JOURNAL OF APPLIED PHYSICS, 1961, 32 (01) :122-&
[2]  
CHINANCHANG R, 1977, APPL PHYS LETT, V31, P759
[3]  
CHOPRA KL, 1969, THIN FILM PHENOMENA, pCH5
[4]   IN1-XGAXAS-GASB1-YASY HETEROJUNCTIONS BY MOLECULAR-BEAM EPITAXY [J].
SAKAKI, H ;
CHANG, LL ;
LUDEKE, R ;
CHANG, CA ;
SAIHALASZ, GA ;
ESAKI, L .
APPLIED PHYSICS LETTERS, 1977, 31 (03) :211-213
[5]  
Wolf HF, 1971, SEMICONDUCTORS, P128
[6]   SOLID SOLUTION IN AIIIBV COMPOUNDS [J].
WOOLLEY, JC ;
SMITH, BA .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1958, 72 (464) :214-223