RANGE DISTRIBUTION THEORY BASED ON ENERGY-DISTRIBUTION OF IMPLANTED IONS

被引：29

作者：

FURUKAWA, S

ISHIWARA, H

机构：

来源：

关键词：

D O I：

10.1063/1.1661249

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1268 / &

共 10 条

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