HIGH-THROUGHPUT AND FULLY AUTOMATED-SYSTEM FOR MOLECULAR-BEAM EPITAXY

被引：9
|
作者：
SAKAI, J
MURAKAMI, S
HIRAMA, K
ISHIDA, T
ODA, Z
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期
关键词：
D O I：
10.1116/1.584425
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1657 / 1661
页数：5
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