DEPTH PROFILING OF THE THIN METAL-FILM SANDWICHES BY SIMS IN CHEMICALLY ACTIVE CONDITIONS

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作者：

SMIRNOV, VK

SIMAKIN, SG

POTAPOV, EV

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IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1990年 / 54卷 / 07期

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O4 [物理学];

学科分类号：

0702 ;

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页码：1343 / 1346

页数：4

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