EFFECT OF DEPOSITION RATE ON ELECTRICAL PROPERTIES OF VACUUM DEPOSITED SILICON OXIDE CAPACITORS

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作者：

PITT, KEG

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来源：

VACUUM | 1967年 / 17卷 / 10期

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D O I：

10.1016/0042-207X(67)90006-1

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T [工业技术];

学科分类号：

08 ;

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页码：560 / &

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