SURFACE INVESTIGATION OF SOLIDS BY STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS)

被引：405
作者：
BENNINGHOVEN, A [1 ]
机构：
[1] UNIV COLOGNE, PHYS INST 1, COLOGNE 5, WEST GERMANY
来源：
SURFACE SCIENCE | 1973年 / 35卷 / 01期
关键词：
D O I：
10.1016/0039-6028(73)90232-X
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：427 / 457
页数：31
相关论文
共 37 条
[1]  
Andersen CA., 1970, INT J MASS SPECTROM, V3, P413, DOI [10.1016/0020-7381(70)80001-8, DOI 10.1016/0020-7381(70)80001-8]
[2]   INFLUENCE OF SURFACE COMPOSITION ON SECONDARY EMISSION OF SOLIDS CAUSED BY DISSOCIATION OF AN ION BOND [J].
BENNINGHOVEN, A .
PHYSICS LETTERS A, 1970, A 32 (06) :427-+
[3]   TANDEM MASS SPECTROMETER FOR SECONDARY ION STUDIES [J].
BENNINGHOVEN, A ;
LOEBACH, E .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (01) :49-+
[4]   ANALYSIS OF SUBMONOLAYERS ON SILVER BY NEGATIVE SECONDARY ION EMISSION [J].
BENNINGHOVEN, A .
PHYSICA STATUS SOLIDI, 1969, 34 (02) :K169-+
[5]   Observing surface oxidation of molybdenum with the statical method of secondary ion mass spectroscopy [J].
Benninghoven, A. .
CHEMICAL PHYSICS LETTERS, 1970, 6 (06) :626-628
[6]   OBSERVATION ON SURFACE-REACTIONS WITH STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY .1. METHOD [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1971, 28 (02) :541-+
[7]   SECONDARY ION YIELDS NEAR 1 FOR SOME CHEMICAL COMPOUNDS [J].
BENNINGHOVEN, A ;
MUELLER, A .
PHYSICS LETTERS A, 1972, A-40 (02) :169-+
[8]   SIMULTANEOUS SIMS, EID, AND FLASH-FILAMENT INVESTIGATIONS OF INTERACTION OF GASES WITH A TUNGSTEN SURFACE [J].
BENNINGHOVEN, A ;
TREITZ, N ;
LOEBACH, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (02) :600-+
[9]   INVESTIGATION OF SURFACE OXIDATION OF METALS IN SUB-MONOLAYER AND MONOLAYER RANGE WITH STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY [J].
BENNINGHOVEN, A ;
MULLER, A .
THIN SOLID FILMS, 1972, 12 (02) :439-+
[10]   MECHANISM OF ION FORMATION AND ION EMISSION DURING SPUTTERING [J].
BENNINGHOVEN, A .
ZEITSCHRIFT FUR PHYSIK, 1969, 220 (02) :159-+
1234