Industry 4.0 Challenges for Vacuum Plant Construction

Zusammenfassung Industry 4.0 - Challenges for constructions of vacuum systems Vacuum systems are finding their way into branches and belonging modern process chains which were hardly in contact with UHV technology in the past. Besides an automatic operation and a flawless processing of parts, vacuum systems and their peripheral devices have to feature options for data output and analysis for subsequent processing in e.g. MES to come up with Industry 4.0 requirements. Subcomponents in vacuum technology partly comply with these requirements in a insufficient way because of their unchanged demands over the last decades. This makes integration into an automatic system more difficult. Despite of that, Industry 4.0 compliant vacuum systems are already producible when there's access to high-level experiences in vacuum and automation technology. This is shown by the examples of residual gas analysis and cleanliness measurement systems and the vacuum bake out oven. A cooperation of vacuum system manufacturers and manufacturers of components is necessary in the future to be able to produce automated vacuum systems in a more efficient way.