共 50 条
- [3] CONDENSER ABERRATIONS IN KOEHLER ILLUMINATION JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1984, 1 (12): : 1316 - 1316
- [5] CRITICAL KOEHLER ILLUMINATION FOR SHAPED BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 83 - 85
- [7] STEPLESS VARIABLE RESISTOR FOR HIGH CURRENTS REVIEW OF SCIENTIFIC INSTRUMENTS, 1961, 32 (01): : 6 - &
- [10] Koehler illumination-based method to improve beam size controllability EMERGING LITHOGRAPHIC TECHNOLOGIES II, 1998, 3331 : 503 - 510