TITANIUM NITRIDE FILMS PREPARED BY ION-IMPLANTATION

被引：12
|
作者：
CHEN, PA [1 ]
YANG, TT [1 ]
机构：
[1] INST NUCL ENERGY RES,LUNGTAN,TAIWAN
来源：
THIN SOLID FILMS | 1981年 / 81卷 / 01期
关键词：
D O I：
10.1016/0040-6090(81)90511-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L91 / L92
页数：2
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