ELECTRICAL-CONDUCTIVITY AND GAS RESPONSE OF PLASMA-POLYMERIZED TITANIUM CONTAINING ORGANIC THIN-FILMS

Titanium-containing organic thin films were prepared from titanium tetraisopropoxied(TIPP) by plasma-polymerization and changes of electrical conductivity in the presence and absence of organic fuel gases were investigated. It was found that titanium containing organic thin films increased its conductivity rapidly in the presence of organic fuel gases such as methanol, ethanol, 1-butanol, t-butyl alcohol, and acetone. Conductivity change is presumably based on the absorption-desorption equilibrium of oxygen gas which react with organic gases at the surface of the film. The mechanism was briefly discussed.