SILICIDE FORMATION USING A SCANNING CW LASER-BEAM

被引：20
|
作者：
SHIBATA, T
GIBBONS, JF
SIGMON, TW
机构：
来源：
APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 07期
关键词：
D O I：
10.1063/1.91548
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：566 / 569
页数：4
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