DISLOCATION NETWORKS IN PHOSPHORUS-IMPLANTED SILICON

被引：46
|
作者：
TAMURA, M [1 ]
机构：
[1] HITACHI LTD,CENT RES LAB,TOKYO 185,JAPAN
来源：
PHILOSOPHICAL MAGAZINE | 1977年 / 35卷 / 03期
关键词：
D O I：
10.1080/14786437708235998
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：663 / 691
页数：29
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