SATURATION CLUSTER DENSITY IN DEPOSITION OF THIN-FILMS FROM VAPORS

被引：7
|
作者：
KASHCHIEV, D
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1979年 / 55卷 / 02期
关键词：
D O I：
10.1002/pssa.2210550204
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：369 / 374
页数：6
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