DIRECT-CURRENT PLASMA DISCHARGES OF FLUOROBROMOMETHANES

被引：5
|
作者：
DRISCOLL, DC [1 ]
SHEINSON, RS [1 ]
机构：
[1] USN,RES LAB,WASHINGTON,DC 20375
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 03期
关键词：
D O I：
10.1116/1.578169
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The ion yield from dc discharges in the fluorobromomethanes CF4-xBrx (x = 0 to x = 3) an CF3Cl has been observed. The ion yield variation with pressure and power is presented. Results for the bromine substituted methanes, and CF3Cl have been compared to examine the effects of molecular symmetry (chemical substitution), and of the electronegativity of the halogen substituent. Input power was varied in order to observe approximate discharge energy de dance, and cell pressure was varied to explore the importance of ion molecule collisions.
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页码：444 / 449
页数：6
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