SIGNIFICANCE OF CHARGE-EXCHANGE IN THE DETERMINATION OF YIELDS IN BROAD-BEAM ION ETCHING

被引：4
|
作者：
VILLALVILLA, JM
SANTOS, C
VALLESABARCA, JA
机构：
来源：
VACUUM | 1989年 / 39卷 / 7-8期
关键词：
D O I：
10.1016/0042-207X(89)90016-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：683 / 685
页数：3
相关论文
共 50 条
  • [1] 16 cm broad-beam ion source for ion-beam etching of quartz wafers
    Rao, Yusheng
    Li, Ming
    Qi, Bo
    Li, Fei
    Review of Scientific Instruments, 1996, 67 (3 pt 2):
  • [2] BROAD-BEAM ION SOURCES
    KAUFMAN, HR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 230 - 235
  • [3] A 16 cm broad-beam ion source for ion-beam etching of quartz wafers
    Rao, YS
    Li, M
    Qi, B
    Li, F
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1009 - 1011
  • [4] Improving broad-beam ion etching equipment through innovative ion optics design
    Li, Xingyu
    Guan, Lulu
    Gao, Jiuru
    Yuan, Jie
    Xu, Kaidong
    Zhuang, Shiwei
    JOURNAL OF MANUFACTURING PROCESSES, 2023, 102 : 839 - 848
  • [5] MATERIAL PROCESSING WITH BROAD-BEAM ION SOURCES
    HARPER, JME
    CUOMO, JJ
    KAUFMAN, HR
    ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 : 413 - 439
  • [6] A VERSATILE BROAD-BEAM ION-SOURCE
    RAO, YS
    TANG, DY
    LIU, XZ
    SHEN, BL
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 321 - 323
  • [7] DEVELOPMENT OF BROAD-BEAM ION SOURCES AT CSSAR
    FENG, YC
    YOU, DW
    KUANG, YZ
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1304 - 1306
  • [8] Uniformity analysis for broad-beam ion source
    Liu, Hong-Xiang
    Zhang, Yun-Dong
    Li, Ling-Hui
    Xiong, Sheng-Ming
    Guangdian Gongcheng/Opto-Electronic Engineering, 2002, 29 (05): : 59 - 61
  • [9] ION-NEUTRAL BEAM EFFECTS IN CHARGE-EXCHANGE CELLS
    HOOPER, EB
    WILLMANN, PA
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (09): : 1102 - 1102
  • [10] Ion-assist applications of broad-beam ion sources
    Kaufman, HR
    Harper, JME
    ADVANCES IN THIN FILM COATINGS FOR OPTICAL APPLICATIONS, 2004, 5527 : 50 - 68
12345