LATTICE EXPANSION COEFFICIENT OF ANTIMONY IN SILICON

被引：0

作者：

RAO, KS

DEMER, LJ

MAR, KM

机构：

[1] UNIV ARIZONA,DEPT MET ENGN,TUCSON,AZ 85721

[2] MOTOROLA INC,SEMICOND RES & DEV LABS,PHOENIX,AZ 85008

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C137 / C137

页数：1

共 50 条

[1] COEFFICIENT OF DEFORMATION OF SILICON CRYSTALLINE LATTICE AT DIFFUSION OF BORON AND ANTIMONY
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