A MODEL OF SUBSTRATE SURFACE-ROUGHNESS EFFECT ON THE ELECTRICAL-PROPERTIES OF THIN-FILMS

被引：3
|
作者：
TOTH, L
机构：
来源：
VACUUM | 1987年 / 37卷 / 1-2期
关键词：
D O I：
10.1016/0042-207X(87)90094-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：103 / 106
页数：4
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