ISOTROPIC THIN-FILM TEXTURE FOR ALTERNATIVE SUBSTRATES

被引:5
|
作者
KOGURE, T
MATSUNO, Y
ITOH, T
SHIMA, C
机构
[1] Tsukuba Research Laboratory, Nippon Sheet Glass Co., Ltd., Tsukuba-City, Ibaraki 300-26
关键词
Fabrication - Friction - Magnetic hysteresis - Magnetic thin films - Magnetometers - Optimization - Sputtering - Substrates - Surfaces - Textures - Transmission electron microscopy;
D O I
10.1109/20.334007
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The performances of isotropic thin film texturing on glass substrates have been investigated. Samples with various surface topographies have been prepared to measure touch-down height(TDH), read/write(R/W) performance and friction coeffient with ahead slider. TDH correlates fairly well to the Peak to Average height of the surface profile measured using AFM. R/W performance is almost the same for the various textures investigated suggesting that the flying height of the slider correlates well with the average height of the textured surface. The initial friction coefficient increases with the density of microbumps.
引用
收藏
页码:4116 / 4118
页数:3
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