ALUMINUM-OXIDES AS IMAGING MATERIALS FOR 193-NM EXCIMER LASER LITHOGRAPHY

被引：9
|
作者：
PANG, SW
KUNZ, RR
ROTHSCHILD, M
GOODMAN, RB
HORN, MW
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.584503
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1624 / 1628
页数：5
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