EPITAXIAL DEPOSITION OF SILICON ON QUARTZ

被引:38
作者
BICKNELL, RW
STIRLAND, DJ
CHARIG, JM
JOYCE, BA
机构
来源
PHILOSOPHICAL MAGAZINE | 1964年 / 9卷 / 102期
关键词
D O I
10.1080/14786436408211908
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:965 / &
相关论文
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