POROSITY IN SPUTTERED PLATINUM FILMS

被引：26

作者：

WESTWOOD, WD ^{[1
]}

机构：

[1] BELL NO RES,OTTOWA,ONTARIO,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.1318656

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Platinum films were prepared by sputtering at various argon temperatures to determine whether affinity for oxygen in argon-oxygen atmospheres is the cause of the porosity effect. Results suggest that porosity is due to decreasing surface mobility caused by increase of pressure during sputtering.

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页码：466 / 471

页数：6

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