共 50 条
- [1] HIGH-RATE PHYSICAL VAPOR-DEPOSITION OF REFRACTORY-METALS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (03): : 697 - 703
- [2] FABRICATION OF FRAMED BERYLLIUM WINDOWS BY HIGH-RATE PHYSICAL VAPOR-DEPOSITION PROCESSES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 83 - 84
- [4] TEMPERATURE AND THICKNESS DISTRIBUTION ON SUBSTRATE DURING HIGH-RATE PHYSICAL VAPOR-DEPOSITION OF MATERIALS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (06): : VM85 - +
- [5] HIGH-RATE VAPOR-DEPOSITION AND LARGE SYSTEMS FOR COATING PROCESSES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 2239 - 2245
- [9] ALTERNATING ION PLATING - METHOD OF HIGH-RATE ION VAPOR-DEPOSITION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04): : 858 - 864