THICKNESS DETERMINATION OF SURFACE OXIDES ON METAL-POWDER BY AES DEPTH PROFILING

被引：18
|
作者：
NORELL, M
NYBORG, L
TUNBERG, T
OLEFJORD, I
机构：
[1] Department of Engineering Metals, Chalmers University of Technology, Göteborg
来源：
SURFACE AND INTERFACE ANALYSIS | 1992年 / 19卷 / 1-12期
关键词：
D O I：
10.1002/sia.740190116
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A method for thickness determination of overlayers on irregularly shaped samples is established using AES depth profiling and stereophotogrammetry. The analysis is performed on a small selected area assumed to be flat. The angle of ion incidence on the area, given by the scalar product of the ion beam vector and the normal to the surface, is obtained by determining the normal using a sterological method based on rotation of a tilted sample. The variation in etch rate with the angle of ion incidence is determined for various oxides on flat samples. Application studies show that the angle of ion incidence on gas-atomized metal particles can be determined from their spherical shape; the variation in etch rate is found to agree well with that calibrated on flat surfaces. It is also demonstrated how the presented method can be used when determining the oxide thickness in different areas on highly irregular water-atomized metal particles.
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页码：71 / 76
页数：6
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