DIELECTRIC FUNCTION OF SPUTTER-DEPOSITED SILICON DIOXIDE AND SILICON-NITRIDE FILMS IN THE THERMAL INFRARED

被引：19
|
作者：
ERIKSSON, TS
JIANG, S
GRANQVIST, CG
机构：
来源：
APPLIED OPTICS | 1985年 / 24卷 / 06期
关键词：
D O I：
10.1364/AO.24.000745
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：745 / 746
页数：2
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