ANNEALING OF AMORPHOUS LAYER IN S+ IMPLANTED GAAS BY ELECTRON-BEAM INSIDE THE ELECTRON-MICROSCOPE

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作者：

RAI, AK

BHATTACHARYA, RS

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来源：

JOURNAL OF MICROSCOPY-OXFORD | 1985年 / 139卷 / SEP期

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D O I：

10.1111/j.1365-2818.1985.tb02647.x

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TH742 [显微镜];

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页码：313 / 320

页数：8

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