RAMAN MICROPROBE ANALYSIS OF TUNGSTEN SILICIDE

被引：23
|
作者：
CODELLA, PJ [1 ]
ADAR, F [1 ]
LIU, YS [1 ]
机构：
[1] INSTRUMENTS SA INC,METUCHEN,NJ 08840
来源：
APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 11期
关键词：
D O I：
10.1063/1.95766
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1076 / 1078
页数：3
相关论文
共 50 条
  • [1] HELIUM MICROPROBE ANALYSIS OF NICKEL SILICIDE DIODES
    THORNTON, J
    HARPER, RE
    ALBURY, DM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 29 (03): : 515 - 520
  • [2] RAMAN-STUDY OF THE FORMATION OF TUNGSTEN SILICIDE THIN-FILMS
    VUPPULADHADIUM, R
    JACKSON, HE
    BOYD, JT
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (11) : 7887 - 7893
  • [3] RAMAN-SCATTERING FROM RAPID THERMALLY ANNEALED TUNGSTEN SILICIDE
    KUMAR, S
    DASGUPTA, S
    JACKSON, HE
    BOYD, JT
    APPLIED PHYSICS LETTERS, 1987, 50 (06) : 323 - 325
  • [4] RAMAN MICROPROBE ANALYSIS OF GAAS WAFERS
    JIMENEZ, J
    GONZALEZ, MA
    MARTIN, B
    CALVO, B
    JOURNAL OF CRYSTAL GROWTH, 1990, 103 (1-4) : 54 - 60
  • [5] RAMAN MICROPROBE ANALYSIS OF PREFORMS AND OPTICAL FIBERS
    CARVALHO, W
    DUMAS, P
    DELHAYE, M
    CORSET, J
    LEVY, Y
    IMBERT, C
    APPLIED OPTICS, 1984, 23 (23): : 4197 - &
  • [6] ANALYSIS OF FLUID INCLUSIONS WITH THE MOLE RAMAN MICROPROBE
    DHAMELINCOURT, P
    BENY, JM
    DUBESSY, J
    POTY, B
    BULLETIN DE MINERALOGIE, 1979, 102 (5-6): : 600 - 610
  • [7] CVD TUNGSTEN AND TUNGSTEN SILICIDE FOR MULTILEVEL METALLIZATION
    WU, S
    PRICE, JB
    ROSLER, RS
    MENDOCA, J
    BEERS, A
    1989 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATIONS: PROCEEDINGS OF TECHNICAL PAPERS, 1989, : 63 - 67
  • [8] TUNGSTEN AND TUNGSTEN SILICIDE ETCHING IN HALOGENATED PLASMAS
    HESS, DW
    SOLID STATE TECHNOLOGY, 1988, 31 (04) : 97 - 103
  • [9] Thermodynamic and elastic properties of tungsten and tungsten silicide
    Hoc, Nguyen Quang
    Dat, Hua Xuan
    Thanh, Pham Trung
    MODERN PHYSICS LETTERS B, 2023, 37 (09):
  • [10] Spatial resolutions and polarization analysis in Raman microprobe technique
    Toyama Univ, Toyama, Japan
    Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 6 A (3463-3467):
12345