FORMATION AND PROPERTIES OF TISI2 FILMS

被引：40
|
作者：
GULDAN, A [1 ]
SCHILLER, V [1 ]
STEFFEN, A [1 ]
BALK, P [1 ]
机构：
[1] AACHEN TECH UNIV,INST SEMICOND ELECTR,SONDERFORSCH BEREICH FESTKORPERELECTR 56,AACHEN,FED REP GER
来源：
THIN SOLID FILMS | 1983年 / 100卷 / 01期
关键词：
D O I：
10.1016/0040-6090(83)90223-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1 / 7
页数：7
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