SURFACE MODIFICATION OF POLYMERS AND METAL IN CARBON TETRAFLUORIDE PLASMA

被引：1
|
作者：
TAKAHASHI, K
KASAI, H
KOGOMA, M
MORIWAKI, T
OKAZAKI, S
机构：
来源：
NIPPON KAGAKU KAISHI | 1985年 / 10期
关键词：
D O I：
10.1246/nikkashi.1985.1916
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：1916 / 1923
页数：8
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