INITIAL WALL CONDITIONING IN DOUBLET-III

被引：5
|
作者：
JACKSON, GL
CLAUSING, RE
LIETZKE, AF
EJIMA, S
EMERSON, LC
HEATHERLY, L
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 04期
关键词：
D O I：
10.1116/1.572229
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1861 / 1867
页数：7
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