COMPUTER MODELING OF SI AND SIC SURFACES AND SURFACE PROCESSES RELEVANT TO CRYSTAL-GROWTH FROM THE VAPOR

被引:203
作者
PEARSON, E
TAKAI, T
HALICIOGLU, T
TILLER, WA
机构
关键词
D O I
10.1016/0022-0248(84)90244-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
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页码:33 / 40
页数:8
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