A FIXTURE FOR PROBING DOUBLE-SIDED SILICON MICROSTRIP DETECTORS

A compact, low-profile device for probing the underside of an unmounted double-sided silicon microstrip detector is described. This unit contains two independent, micro-positionable probes which may be landed on pads on the lower side of the wafer, for example the bias and guard ring connections, while the operator observes via microscope. The upper surface is left unobstructed. The wafer is secured via vacuum chuck and Delrin locating pins and rests on a Teflon film to protect and electrically isolate its lower surface. All pins and controls are low-profile, allowing the upper side of the detector to be probed with conventional manual probes and probe cards. All surfaces are easy to clean and all moving parts are fabricated using materials which require no lubrication, making the unit suitable for clean room use.