OPTICAL MONITORING OF THE ENDPOINT IN THIN-FILM PLASMA-ETCHING

被引：12

|

作者：

BRAGA, ES ^{[1
]}

MENDES, GF ^{[1
]}

FREJLICH, J ^{[1
]}

MAMMANA, AP ^{[1
]}

机构：

[1] UNIV ESTADUAL CAMPINAS,INST FIS,OTICA LAB,BR-13100 CAMPINAS,SP,BRAZIL

来源：

THIN SOLID FILMS | 1983年 / 109卷 / 04期

关键词：

D O I：

10.1016/0040-6090(83)90189-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：363 / 369

页数：7

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