共 50 条
- [3] PROPERTIES OF SPUTTERED TANTALUM SILICIDE FILMS PROCEEDINGS OF THE 7TH SYMPOSIUM ON ION BEAM TECHNOLOGY, 1989, : 63 - 68
- [5] ELECTRON-DIFFRACTION ON SPUTTERED TANTALUM FILMS HELVETICA PHYSICA ACTA, 1979, 52 (01): : 79 - 79
- [6] AN INVESTIGATION OF SPUTTERED BETA TANTALUM THIN FILMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1966, 3 (05): : 307 - &