EFFECT OF MIXING IONS ON THE FORMATION PROCESS OF BETA-SIC FABRICATED BY ION-BEAM MIXING

被引：4
|
作者：
KIMURA, T [1 ]
YAMAGUCHI, H [1 ]
LUO, JK [1 ]
YUGO, S [1 ]
ADACHI, Y [1 ]
KAZUMATA, Y [1 ]
机构：
[1] JAPAN ATOM ENERGY RES INST,TOKAI,IBARAKI 31911,JAPAN
来源：
THIN SOLID FILMS | 1988年 / 157卷 / 01期
关键词：
D O I：
10.1016/0040-6090(88)90352-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：117 / 127
页数：11
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