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- [9] Resist processes for low-energy electron-beam lithography Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1997, 15 (06):
- [10] PROXIMITY EFFECTS IN LOW-ENERGY ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2367 - 2372