LOW-FREQUENCY DIELECTRIC-PROPERTIES OF CO-AL2O3 COMPOSITE FILMS

被引：8

|

作者：

NIKLASSON, GA

BRANTERVIK, K

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 14期

关键词：

D O I：

10.1063/1.97986

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：937 / 939

页数：3

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