STM NANOMETRIC STUDY OF THE INITIAL-STAGES OF DIAMOND FILM GROWTH - QUANTITATIVE MEASUREMENT OF (111) AND (100) SURFACE-ROUGHNESS

被引:4
|
作者
VAZQUEZ, L
SANCHEZ, O
MESSEGUER, F
ALBELLA, JM
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D O I
10.1016/0925-9635(94)90255-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The morphology of diamond films grown on silicon substrates by the chemical vapor deposition method has been studied by scanning tunneling microscopy (STM). STM images reveal isolated crystals grown on a faceted granular structure for 15 min deposition time. The faceted structure could be the initial film morphology leading to further diamond growth. After 30 min, a continuous film has already formed, with an improved crystalline quality. The film displays predominantly {111} and {100} faces. High-resolution images show that the {111} surface is rougher than the {100} one from the early stages of growth, supporting {100} surface reconstruction during the growth process. A step morphology is also found for the {100) faces.
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页码:715 / 719
页数:5
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