AIN FILM PREPARATION ON GLASS BY SPUTTERING SYSTEM WITH FACING TARGETS

被引：8
|
作者：
TOMINAGA, K
SHINTANI, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷
关键词：
D O I：
10.7567/JJAPS.28S2.7
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：7 / 10
页数：4
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