DEVELOPMENT OF TEST STRUCTURES FOR SILICON PARTICLE DETECTORS

被引：2
|
作者：
HEIJNE, EHM [1 ]
DEBUSSCHERE, I [1 ]
DECLERCK, G [1 ]
VANSTRAELEN, G [1 ]
机构：
[1] IMEC,LEUVEN,BELGIUM
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1987年 / 253卷 / 03期
关键词：
D O I：
10.1016/0168-9002(87)90514-6
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：325 / 332
页数：8
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