DEFECT DISTRIBUTION IN CRYSTALLINE SILICON IRRADIATED WITH HIGH-ENERGY ELECTRONS

被引:5
|
作者
YASUDA, K
WADA, T
MASUDA, H
TAKEDA, M
IKUTA, S
机构
[1] GOVT IND RES INST,NAGOYA,AICHI 462,JAPAN
[2] NAGOYA INST TECHNOL,DEPT ELECTR,NAGOYA,AICHI 466,JAPAN
来源
关键词
D O I
10.1002/pssa.2210880219
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
15
引用
收藏
页码:543 / 551
页数:9
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