EFFECTS OF BIAS VOLTAGE ON PROPERTIES AND STRUCTURE OF SPUTTERED AND ION-PLATED COATINGS

被引：3
|
作者：
CARMICHAEL, DC [1 ]
机构：
[1] BATTELLE MEM INST, COLUMBUS LABS, MAT PROC TECHNOL DEPT, COLUMBUS, OH 43201 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 04期
关键词：
D O I：
10.1116/1.1312725
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：639 / 639
页数：1
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