STRUCTURE, OPTICAL AND ELECTRICAL PROPERTIES OF SILICON-RICH SILICON-NITRIDE FILMS

被引：17
|
作者：
VOSKOBOYNIKOV, VV [1 ]
GRITSENKO, VA [1 ]
DIKOVSKAYA, ND [1 ]
ZAITSEV, BN [1 ]
MOGILNICOV, KP [1 ]
OSADCHII, VM [1 ]
SINITSA, SP [1 ]
EDELMAN, FL [1 ]
机构：
[1] ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
来源：
THIN SOLID FILMS | 1976年 / 32卷 / 02期
关键词：
D O I：
10.1016/0040-6090(76)90327-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：339 / 342
页数：4
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